Ms. Huiyuan Wang Profile

Huiyuan Wang

at National Univ of Defense Technology

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Proceedings Article | 23 October 2018 Paper

Squeeze-film damping in optically driven resonant graphene accelerometer

Huiyuan Wang, Feng Hu, Xingshu Wang, Shiqiao Qin

Proceedings Volume 10821, 1082116 (2018) https://doi.org/10.1117/12.2500190

KEYWORDS: Graphene, Resonators, Nanoelectromechanical systems, Microelectromechanical systems

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With the development of military industry and intelligence, accelerometer with high-performance will be demanded imminently. The resonant graphene accelerometer combines excellent mechanics and mechanism properties of graphene with the technique of MEMS accelerometer, with the advantages of high-performance, low-energy consumption, lowcost and mass production. An optically driven resonant graphene accelerometer is resonated by a laser beam with periodically varying intensity. A single-layer graphene fixed on its substrate is heated by the laser beam to make the graphene film resonate. When there is external acceleration, a proof mass fixed on the single-layer graphene film can change the resonant frequency by adding a force on the film. The acceleration can be calculated through the variation of the resonant frequency. However, the deadly drawback of the optically driven resonant graphene accelerometer is its low quality factor, which is large dissipation. In this paper, the mechanism of the squeeze-film air damping of a resonant graphene accelerometer is theoretically modeled. The influential parameters are optimized to decrease the damping. The results show that the effect of squeezefilm damping on quality factor can be significant, while that on resonant frequency can be negligible. Meanwhile, the squeeze-film damping will increase as the pressure, free and fixed edges of the single-layer graphene grow. The influence on the quality factor by changing the size of the free edges is more remarkable, compared to that of fixed edges. Therefore, decreasing the pressure and geometrical size of the single-layer graphene, especially the free edges, is an effectively method to reduce the damping of the resonant graphene accelerometer.

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