By utilizing the band-selective nature of optically resonant nanoparticles, Tanner Research is developing a room
temperature multi-spectral IR detection technology termed Nanobolometer. Because the device physics is not based on
photodiode/photoconductive (cooled IR detectors) operation, it does not require cooling. It is also not a heat sensing
(Microbolometers) scheme and is capable of multi-spectral detection from NIR to LWIR. A nanobolometer is built on a
Si substrate for the entire detection bands (NIR-LWIR), which enables low material and fabrication costs, with an added
advantage of being able to integrate UV/Vis detector pixels in the same platform. We present the theory and working
principle of Tanner's Nanobolomter technology and report a proof-of-concept demonstration that achieved IR detection
at 1.5 μm. Tanner's on-going R&D effort aims to extend the detection bands to MWIR/LWIR.
We describe the theory and report the first experimental demonstration of Cavity Resonance Lithography (CRL); a
double pattering (DP) technique that can generate patterns 1) with twice the spatial frequency of that of the diffraction
limited lithography mask, and 2) at an offset distance that is in the farfield of the mask. CRL requires only a single
exposure and development step and does not require any additional processes. With commercially available photoresists
(PR) and developers, we have recorded a 32.5 nm half-pitch pattern (which is well below the diffraction limit) at an
offset distance of 180 nm (which is well beyond the evanescent decay length scales) using 193 nm illumination. We also
discuss strategies to improve the minimum feature size and potential implementation schemes.
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