In this paper, an all-dielectric metasurface for surface enhanced Raman spectroscopy (SERS) is presented. The proposed design constitutes of an array of silicon (Si) dimers on top of thin film of silicon nitride (SiN), deposited on a glass substrate. The coupling mechanism between the dimers is based on two orthogonal guided waves in the SiN film. These guided modes lead to a strong separation between excitation and emitted Raman signal in the waveguide. The new design is compared to a previously published dielectric design with a gold backing mirror. The comparison takes into account manufacturability, field enhancement and thermal aspects. This shows that the all-dielectric design has about 7 times less power dissipation but the enhancement factor is about 20 times smaller.
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