Kazunori Taguchi
at Zeon Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12957, 129570P (2024) https://doi.org/10.1117/12.3009737
KEYWORDS: Extreme ultraviolet lithography, Lithography, Polymers, Extreme ultraviolet, Film thickness, Etching, Electron beam lithography, Optical lithography, Photoresist materials, Critical dimension metrology

Proceedings Article | 21 November 2023 Poster + Paper
Proceedings Volume 12750, 127500U (2023) https://doi.org/10.1117/12.2686602
KEYWORDS: Extreme ultraviolet lithography, Electron beam lithography, Polymers, Lithography, Stochastic processes, Scanners, Printing, High volume manufacturing, Extreme ultraviolet, Polymer thin films

Proceedings Article | 26 September 2019 Paper
Proceedings Volume 11148, 1114814 (2019) https://doi.org/10.1117/12.2536526
KEYWORDS: Fluorine, Chemical species, Scanning electron microscopy, Lithography, Optical lithography, Absorption, Carbon

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