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Kevin J. Liddane
at Self
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Publications (3)
Proceedings Article | 3 September 1999 Paper
New optical sensor for real-time in-situ end point monitoring during dry etching of III-V ternary multistack layers
Kevin Liddane, Ramdane Benferhat, Jewon Lee, Russell Westerman, David Johnson, John Donohue, Jay Sasserath, Stephen Pearton
Proceedings Volume 3882, (1999) https://doi.org/10.1117/12.361321
KEYWORDS: Etching, Interferometry, Gallium arsenide, Cameras, Semiconducting wafers, Process control, Dry etching, Control systems, Refractive index, Reflection
Proceedings Article | 30 August 1999 Paper
New sensor for real-time trench depth monitoring in micromachining applications
Pascal Amary, Ramdane Benferhat, Kevin Liddane, Alain Ostrovsky
Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361223
KEYWORDS: Etching, Interferometry, Reflection, Signal processing, Prisms, Micromachining, Silicon, Sensors, Refractive index, Optical properties
Proceedings Article | 24 June 1993 Paper
Optical raytrace analysis as a method for evaluating grating-based spectrograph performance
Chiu Chau, Kevin Liddane
Proceedings Volume 1895, (1993) https://doi.org/10.1117/12.146724
KEYWORDS: Spectrographs, Sensors, Geometrical optics, Light, Charge-coupled devices, Ray tracing, Diagnostics, Mirrors, Chromatic aberrations, Aspheric lenses
Proceedings Volume Editor (1)
Conference Committee Involvement (2)
NanoScience + Engineering
26 August 2007 | San Diego, United States
Ultrasensitive Instrumentation for DNA Sequencing and Biochemical Diagnostics
8 February 1995 | San Jose, CA, United States
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