MicroLED arrays are arrangements of small, individually addressable LED pixels, which offer the possibility to obtain any desired illumination pattern with a high spatial and temporal control. In this work, we report on the advanced fabrication of micro- and nanoLED arrays and their system integration including electronics and graphical user interface. The combination of the chip-based LED array, electronics and software is called a MicroLED platform.
The light density output, homogeneity and switching behavior of the arrays are investigated. The system allows the modulation of the single light sources with a spatial resolution in the micron range and enables the programming of different light patterns at modulation frequencies up to the MHz range. The fully integrated system with microLED array and electronics is shown during presentation are now available as Structured Micro Illumination Platforms (SMILE) for applications from sensing to microscopy to quantum computing.
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