Mr. Kwak Do Yong Profile

Kwak Do Yong

at SK Hynix

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Publications (1)

Proceedings Article | 27 March 2017 Paper

Factors analysis on the physical properties of the low-temperature SOC of memory cell characteristics

Doyoung Kwak, Jaeyeol Kim, Jihoon Park, Jeonqsu Park, Sungkoo Lee, Seomin Kim, Taewoo Jung, Hyeongsoo Kim

Proceedings Volume 10146, 1014627 (2017) https://doi.org/10.1117/12.2257983

KEYWORDS: Etching, System on a chip, Process control, Factor analysis, Semiconductors, Tolerancing, Semiconducting wafers, Photoresist processing, Optical lithography, Plasma, Inspection

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