Prof. Laurent Karsenti
Project Manager DFM at Magma Design Automation Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 3 April 2010 Paper
J. Le Denmat, V. Charbois, L. Tetar, M. Luche, G. Kerrien, F. Robert, E. Yesilada, F. Foussadier, L. Couturier, L. Karsenti, M. Geshel
Proceedings Volume 7641, 76410Y (2010) https://doi.org/10.1117/12.848763
KEYWORDS: Semiconducting wafers, Inspection, Wafer inspection, Optical alignment, Defect inspection, Finite element methods, Statistical analysis, Optical proximity correction, Etching, Control systems

Proceedings Article | 24 March 2009 Paper
Laurent Karsenti, Arno Wehner, Andreas Fischer, Uwe Seifert, Jens Goeckeritz, Mark Geshel, Dieter Gscheidlen, Avishai Bartov
Proceedings Volume 7272, 727239 (2009) https://doi.org/10.1117/12.814095
KEYWORDS: Inspection, Semiconducting wafers, Finite element methods, SRAF, Defect inspection, Optical proximity correction, Design for manufacturing, Metrology, Lithography, Modulation

Proceedings Article | 4 March 2008 Paper
Andreas Fischer, Uwe Seifert, Arno Wehner, Laurent Karsenti, Mark Geshel, Amiad Conley, Dieter Gscheidlen, Avishai Bartov
Proceedings Volume 6925, 69251S (2008) https://doi.org/10.1117/12.775713
KEYWORDS: Semiconducting wafers, Computer aided design, Scanning electron microscopy, Metrology, Defect inspection, Optical transfer functions, Photomasks, Optical proximity correction, Finite element methods, Lithography

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