Mamoru Terai
Head Researcher at Mitsubishi Electric Corp
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 1 April 2009 Paper
Takuya Hagiwara, Mamoru Terai, Takeo Ishibashi, Tomofumi Miyauchi, Shinya Hori, Teruhiko Kumada, Tomoya Kumagai, Atsushi Sawano, Kosuke Doi, Takeshi Matsunobe, Naoki Man, Hirofumi Seki, Yusaku Tanahashi, Tetsuro Hanawa
Proceedings Volume 7273, 727324 (2009) https://doi.org/10.1117/12.813643
KEYWORDS: Polymers, Photoresist processing, Semiconducting wafers, Lithography, Coating, Photomasks, Chemical analysis, Critical dimension metrology, Fluorine, Scanners

Proceedings Article | 26 March 2008 Paper
Proceedings Volume 6923, 69231V (2008) https://doi.org/10.1117/12.771794
KEYWORDS: Semiconducting wafers, Coating, Silicon, Head-mounted displays, Immersion lithography, Manufacturing, Fluorine, Particles, Calcium, Prototyping

Proceedings Article | 7 March 2008 Paper
Mamoru Terai, Takeo Ishibashi, Masaaki Shinohara, Kazumasa Yonekura, Takuya Hagiwara, Tetsuro Hanawa, Teruhiko Kumada
Proceedings Volume 6924, 692420 (2008) https://doi.org/10.1117/12.771855
KEYWORDS: Etching, Double patterning technology, Silicon, Optical lithography, Coating, Photomasks, FT-IR spectroscopy, Photoresist processing, Silica, Scanning electron microscopy

Proceedings Article | 2 April 2007 Paper
Proceedings Volume 6519, 65191S (2007) https://doi.org/10.1117/12.711058
KEYWORDS: Water, Bridges, Immersion lithography, Semiconducting wafers, Digital watermarking, Surface properties, Polymers, Chemical analysis, Defect inspection, Standards development

Proceedings Article | 11 April 2006 Paper
Tetsuro Hanawa, Toshifumi Suganaga, Takeo Ishibashi, Shinroku Maejima, Koichiro Narimatsu, Kazuyuki Suko, Mamoru Terai, Teruhiko Kumada, Junichi Kitano
Proceedings Volume 6153, 61531O (2006) https://doi.org/10.1117/12.655568
KEYWORDS: Thin film coatings, Immersion lithography, Lithography, Semiconducting wafers, Scanners, Photoresist processing, Contamination, Defect inspection, Chemical analysis, Absorption

Showing 5 of 8 publications
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