CONFERENCE PROCEEDINGS
Advanced Search
Maria Usuga Higuita
at Lab Hubert Curien
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 3 October 2022 Presentation + Paper
Laser interference and nanospheres UV lithography to produce micro and nanostructured TiO2 and TiN based sol-gel layers
Proceedings Volume 12201, 1220107 (2022) https://doi.org/10.1117/12.2635170
KEYWORDS: Titanium dioxide, Tin, Sol-gels, Lithography, Diffraction gratings, Ultraviolet radiation, Thin films, Silica, Photomasks, Nanoimprint lithography
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top