Dr. Martin Weiss Profile

Dr. Martin Weiss

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Publications (2)

Proceedings Article | 27 April 2023 Presentation + Paper

Overlay challenges in the era of high-NA

M. Weiss

Proceedings Volume 12496, 1249603 (2023) https://doi.org/10.1117/12.2664960

KEYWORDS: Printing, Reticles, Scanners, Overlay metrology, Extreme ultraviolet lithography, Extreme ultraviolet, Semiconducting wafers, Lithography, Photomasks, Optical lithography

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Proceedings Article | 10 January 1996 Paper

Theoretical and experimental investigations of surface plasmon waveguide structures for sensing applications

Martin Weiss, Ramakant Srivastava, Howard Groger

Proceedings Volume 2695, (1996) https://doi.org/10.1117/12.229972

KEYWORDS: Refractive index, Waveguides, Surface plasmons, Metals, Water, Wave propagation, Waveguide sensors, Polarization, Structural sensing, Dielectrics

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