Mr. Masaki Sugie Profile

Masaki Sugie

at Hitachi High-Tech Corp

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Author

Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper

Defect inspection methodology for contact holes

D. Van den Heuvel, C. Beral, B. Chowrira, P. Foubert, D. De Simone, G. Lorusso, M. Beggiato, S. Das, A. Charley, M. Sugie, N. Ban, H. Koike, M. Isawa, W. Sun

Proceedings Volume 12955, 129553S (2024) https://doi.org/10.1117/12.3015844

KEYWORDS: Semiconducting wafers, Inspection, Extreme ultraviolet, Metrology, Light sources and illumination, Stochastic processes, Etching, Defect inspection, Transmission electron microscopy

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Proceedings Article | 27 April 2023 Presentation + Paper

High repeatability and low shrinkage solution using CD-SEM for EUV resist

Masaki Sugie, Toshimasa Kameda, Shunsuke Mizutani

Proceedings Volume 12496, 1249615 (2023) https://doi.org/10.1117/12.2657680

KEYWORDS: Shrinkage, Extreme ultraviolet, Semiconducting wafers, Image quality, Electron beams, Extreme ultraviolet lithography, Signal intensity, Semiconductors

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