Ms. Melissa Anderson Profile

Melissa Anderson

Director Product Marketing & Bus Dev at Aprio Technologies Inc

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Publications (3)

Proceedings Article | 20 October 2006 Paper

A novel approach for hot-spot removal for sub-100nm manufacturing

Melody Ma, Melissa Anderson, Weinong Lai, Clive Wu, Becky Tsao, Chih-wei Chu, Char Lin, Jacky Chou, Sidney Tsai

Proceedings Volume 6349, 63492P (2006) https://doi.org/10.1117/12.686960

KEYWORDS: Optical proximity correction, Lithography, Manufacturing, Model-based design, Databases, Inspection, Product engineering, Image processing, Silicon, Metals

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Proceedings Article | 8 November 2005 Paper

Enabling incremental RET to exploit hierarchical structure across multiple designs for sub-100 nm lithography

Mark Laurance, Melissa Anderson, Mark Pilloff

Proceedings Volume 5992, 59922S (2005) https://doi.org/10.1117/12.631875

KEYWORDS: Optical proximity correction, Manufacturing, Resolution enhancement technologies, Design for manufacturability, Process modeling, Lithography, Model-based design, Structural design, Data modeling, Photomasks

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Proceedings Article | 7 November 2005 Paper

Applying reconfigurable RET across process window to create more robust manufacturing designs

Mark Laurance, Abhishek Vikram, Melody Ma, William Volk, Melissa Anderson, Scott Andrews, Bo Su, Hong Du, Gaurav Verma

Proceedings Volume 5992, 59921X (2005) https://doi.org/10.1117/12.631877

KEYWORDS: Optical proximity correction, Inspection, Resolution enhancement technologies, Manufacturing, Design for manufacturability, Model-based design, Photomasks, Lithography, Defect inspection, Semiconducting wafers

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