Mick Giusti
Project Manager at KLA Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 8 June 2010 Paper
William Broadbent, David Alles, Michael Giusti, Damon Kvamme, Rui-fang Shi, Weston Sousa, Robert Walsh, Yalin Xiong
Proceedings Volume 7748, 774828 (2010) https://doi.org/10.1117/12.868417
KEYWORDS: Reticles, Inspection, Extreme ultraviolet, Image resolution, Logic, Defect detection, Image transmission, EUV optics, Defect inspection, Image segmentation

Proceedings Article | 5 April 2007 Paper
Proceedings Volume 6518, 65182I (2007) https://doi.org/10.1117/12.712367
KEYWORDS: Reticles, Inspection, Image transmission, Databases, Imaging systems, Image processing, Data modeling, Defect detection, Optical proximity correction, Sensors

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