Dr. Murat Pak
at imec
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume PC12953, PC129530Z (2024) https://doi.org/10.1117/12.3011854
KEYWORDS: Critical dimension metrology, Extreme ultraviolet lithography, Optical lithography, Line width roughness, Photoresist materials, Semiconducting wafers, Finite element methods, Printing, Inspection, Cadmium

Proceedings Article | 21 November 2023 Presentation + Paper
M. Pak, A. Dauendorffer, K. Nafus, A. Das, M. Hasan, P. Delgadillo
Proceedings Volume 12750, 1275004 (2023) https://doi.org/10.1117/12.2686265
KEYWORDS: Silicon carbide, Standards development, Optical lithography, Extreme ultraviolet lithography, Array processing, Printing, Photoresist processing, Design and modelling

Proceedings Article | 26 May 2022 Paper
Murat Pak, Wesley Zanders, Patrick Wong, Sandip Halder, Romuald Blanc, Laurent Souriau, Jeonghoon Lee, Gouri Sankar Kar
Proceedings Volume 12051, 120510J (2022) https://doi.org/10.1117/12.2618761
KEYWORDS: Semiconducting wafers, Photoresist materials, Array processing, Extreme ultraviolet lithography, Optical lithography, Finite element methods, Etching, Electroluminescence, Critical dimension metrology, Scanning electron microscopy

Proceedings Article | 26 March 2019 Presentation + Paper
Murat Pak, Davide Crotti, Farrukh Yasin, Monique Ercken, Sandip Halder, Danilo De Simone, Pieter Vanelderen, Laurent Souriau, Hubert Hody, Gouri Sankar Kar
Proceedings Volume 10957, 109570R (2019) https://doi.org/10.1117/12.2515023
KEYWORDS: Etching, Optical lithography, Semiconducting wafers, Critical dimension metrology, Resistance, Magnetism, Photoresist processing, Manufacturing, Printing, Extreme ultraviolet lithography

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