Dr. Mustapha Chouiki
at IMS Nanofabrication GmbH
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 19 February 2020 Paper
Christine Thanner, Anna Dudus, Dominik Treiblmayr, G. Berger, M. Chouiki, Stephan Martens, Michael Jurisch, Julian Hartbaum, Martin Eibelhuber
Proceedings Volume 11310, 1131010 (2020) https://doi.org/10.1117/12.2543692
KEYWORDS: Nanoimprint lithography, Manufacturing, Augmented reality, Semiconducting wafers, Waveguides, Optics manufacturing, Electron beam lithography, Polymers, High volume manufacturing, Nanostructures

Proceedings Article | 21 March 2017 Paper
H. Teyssedre, S. Landis, P. Brianceau, M. Mayr, C. Thanner, M. Laure, W. Zorbach, M. Eibelhuber, L. Pain, M. Chouiki, M. Wimplinger
Proceedings Volume 10144, 101440V (2017) https://doi.org/10.1117/12.2260002
KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Manufacturing, Critical dimension metrology, Lithography, High volume manufacturing, Calibration, Standards development, Etching, Silicon, Metrology, Scanning electron microscopy

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