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Naoto Kihara
Manager at Nikon Corp
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Publications (1)
Proceedings Article | 21 December 2001 Paper
New method for simulating charging effects on specimens in electron beam testing
Naoto Kihara, Erika Kanematsu, Yoshinobu Kimura, Hiroshi Hayashi, Noriyuki Ishihara
Proceedings Volume 4510, (2001) https://doi.org/10.1117/12.451279
KEYWORDS: Monte Carlo methods, Scattering, Semiconductors, Diffusion, Device simulation, Metals, Dielectrics, Aluminum, Optical simulations, Electron beams
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