We will present advances of metasurface fabrication which enable substrate-engraved antireflection surfaces and birefringence elements. Large-beam 351 nm laser damage performance of designer metasurfaces fabricated for antireflection applications will be discussed. We will also present fabrication technology that has helped pave the way toward subwavelength quasi-linear all-glass metasurface gratings for quarter waveplate application at 351 nm.
Metasurfaces exhibit great potential to redefine limitations inhibiting high power laser optics. Some areas of expected improvement include throughput improvement with enhanced design flexibility, mitigation of filamentation damage by enabling thinner optics, and reduction in system complexity and price. Metasurface utilize engineered surface ‘layer’ with thickness on the order of the design wavelength, which consists of an array of sub-wavelength elements. Our methodology is based on scalable generation of sacrificial metal nanoparticle mask followed by directional etching to pattern the glass. The end-result all-glass metasurface has high laser damage durability, mechanical robustness, design flexibility and controllability of the metasurface features, and the ability to craft antireflective layers and basic optical elements. Recent advancements have been made resulting in ultra-broadband antireflective layers, induced birefringence in the glass for waveplates, and refined optical elements.
We present a method for producing durable thin optics for high-power lasers, using scalable process for spatially patterned glass engraved metasurface. The process is based on forming an etch-mask using laser raster-scan of a thin metal film on a glass, followed by dry-etching and removal of the metal mask. We present fabricated structures, and characterization of their optical performance, mechanical stability, and laser damage performance.
Recent work utilizing metal etching masks to fabricate substrate-engraved metasurfaces have been handicapped by the available etching depth, restricting the bandwidth of antireflective performance. Advances made to etch mask technology to facilitate deeper etching will be discussed here, and the taller ensuant metasurface features will be presented. The antireflective performance of these high aspect ratio structures (broad acceptance angles and broadband antireflective performance for both polarizations) will be discussed.
We present a method for producing spatially invariant glass engraved meta-surfaces, which is scalable, has high mechanical stability, and has high laser damage durability. The process is based on dewetting a thin metal film on a glass, followed by dry etching and metal mask removal. We will present masking technology that enables deeper etching while maintaining sub-wavelength feature sizes, performance of the optimized metasurfaces as antireflective layers, mechanical stability and laser durability of the fabricated surfaces, and discuss ongoing work.
We present an alternative approach to dielectric meta-surfaces and demonstrate its scalability, mechanical durability and laser damage resilience. The process is based on laser raster-scan of a thin metal film on a glass, followed by dry-etching and removal of the metal nano-particles mask. We will present new approaches developed to “boost” the attainable optical response based on new underlying physics of the laser printed Au nanoparticle mask.
We present a method for producing spatially patterned glass engraved meta-surfaces, which is scalable, has high mechanical stability and high laser damage durability, and thus promising for ultra-thin optics implementation for high-power lasers. The process is based on laser raster-scan of a thin metal film on a glass, followed by dry-etching and removal of the metal mask. We present fabricated structures, characterization of their optical performance, mechanical stability and laser damage performance.
We present a simple and scalable method for the production of optics with incorporated metasurfaces, resulting in durable all-dielectric based meta-optics. The scalability and robustness of this method overcome limitations imposed by current technology when fabricating metasurfaces for high power laser applications, while the simplicity of the fabrication process makes it an exciting technique for metasurface generation. This talk will describe the method, show resultant fabricated metasurfaces and the sensitivity introduced by processing parameters – i.e. control over generated surfaces, and discuss the laser damage performance of these engineered large-scale metasurfaces.
Loose abrasive grinding was performed on a wide range of optical workpiece materials [single crystals of Al2O3 (sapphire), SiC, Y3Al5O12 (YAG), CaF2, and LiB3O5 (LBO); a SiO2-Al2O3-P2O5-Li2O glass-ceramic (Zerodur); and glasses of SiO2 : TiO2 (ULE), SiO2 (fused silica), and P2O5-Al2O3-K2O-BaO (phosphate)]. Using the magneto rheological finishing (MRF) taper wedge technique (where a wedge was polished on each of the ground workpieces and the resulting samples were appropriately chemically etched), the subsurface mechanical damage (SSD) characteristics were measured. The SSD depth for most of the workpiece materials was found to scale as E11/2 / H1, where E1 is the elastic modulus and H1 is the hardness of the workpiece. This material scaling is the same as that for the growth of lateral cracks, suggesting that lateral cracks are a dominant source for SSD rather than radial/median cracks, as previously proposed. Utilizing the SSD depth data from both this study and others, semiempirical relationships have been formulated, which allows for estimating the SSD depth as a function of workpiece material and important grinding parameters (such as abrasive size and applied pressure).
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.