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Nimet Kutay Eryilmaz
at RWTH Aachen Univ
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Publications (1)
Proceedings Article | 13 October 2020 Presentation + Paper
Accuracy analysis of a stand-alone EUV spectrometer for the characterization of ultrathin films and nanoscale gratings
Sophia Schröder, Lukas Bahrenberg, Nimet Kutay Eryilmaz, Sven Glabisch, Serhiy Danylyuk, Sascha Brose, Jochen Stollenwerk, Peter Loosen
Proceedings Volume 11517, 115170S (2020) https://doi.org/10.1117/12.2573148
KEYWORDS: Extreme ultraviolet, Spectroscopy, Reflectivity, Reflectance spectroscopy, Reflectometry, Optical components, Model-based design, Statistical modeling, Statistical analysis, Plasma
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