Unspecified Patrick Recknagel Profile

Patrick Recknagel

at Fraunhofer-Institut für Photonische Mikrosysteme IPMS

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Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

MEMS-on-CMOS integration of a holographic 8M-pixel SLM device using KrF-lithography

S. Döring, P. Recknagel, C. Hohle, P. Dürr

Proceedings Volume 12958, 1295809 (2024) https://doi.org/10.1117/12.3010154

KEYWORDS: Actuators, Optical lithography, Spatial light modulators, Lithography, Semiconducting wafers, Overlay metrology, Holography, Microelectromechanical systems, Reactive ion etching, Micromirrors

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