Mr. Paul L. Winpenny Profile

Paul L. Winpenny

at Univ of Southampton

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Author

Publications (2)

Proceedings Article | 1 May 2023 Presentation + Paper

Enhancing the sensitivity of a high resolution negative-tone metal organic photoresist for extreme ultra violet lithography

Scott Lewis, Hayden Alty, Michaela Vockenhuber, Guy DeRose, Dimitrios Kazazis, Grigore Timco, James Mann, Paul Winpenny, Axel Scherer, Yasin Ekinci, Richard Winpenny

Proceedings Volume 12498, 124980X (2023) https://doi.org/10.1117/12.2658324

KEYWORDS: Extreme ultraviolet lithography, Etching, Electron beam lithography, Monte Carlo methods, Electron beams, Mercury, Silicon, Molecules, Dry etching

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SPIE Journal Paper | 2 June 2022

Sensitivity enhancement of a high-resolution negative-tone nonchemically amplified metal organic photoresist for extreme ultraviolet lithography

Scott Lewis, Hayden Alty, Michaela Vockenhuber, Guy DeRose, Antonio Fernandez Mato, Dimitrios Kazazis, Paul Winpenny, Richard Grindell, Grigore Timco, Axel Scherer, Yasin Ekinci, Richard E. Winpenny

JM3, Vol. 21, Issue 04, 041404, (June 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.041404

KEYWORDS: Extreme ultraviolet lithography, Selenium, Electron beam lithography, Monte Carlo methods, Metals, Mercury, Molecules, Chemical species, Photomicroscopy, Absorption

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