Dr. Peng Jin Profile

Dr. Peng Jin

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Publications (2)

SPIE Journal Paper | 1 October 2004

Ultrathick SU-8 fabrication for microreciprocating engines

Peng Jin, Kyle Jiang, Nianjun Sun

JM3, Vol. 3, Issue 04, (October 2004) https://doi.org/10.1117/12.10.1117/1.1793155

KEYWORDS: Ultraviolet radiation, Photoresist materials, Lithography, Image processing, Absorption, Carbon monoxide, Scanning electron microscopy, Transparency, Sun, Photoresist developing

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Proceedings Article | 15 January 2003 Paper

Microfabrication of ultrathick SU-8 photoresist for microengines

Peng Jin, Kyle Jiang, Nianjun Sun

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478248

KEYWORDS: Ultraviolet radiation, Photoresist materials, Microfabrication, Lithography, Absorption, Microelectromechanical systems, Carbon monoxide, Transparency, Actuators, Combustion

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