Dr. Pengtao Lu Profile

Dr. Pengtao Lu

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Lithography performance improvement of MOR by underlayers

Si Li, Xinlin Lu, Stephen Grannemann, Daniel Sweat, Kelsey Brakensiek, Pengtao Lu, Joyce Lowes, Vandana Krishnamurthy, Veerle Van Driessche, Douglas Guerrero

Proceedings Volume 12957, 1295715 (2024) https://doi.org/10.1117/12.3010887

KEYWORDS: Polymers, Film thickness, Lithography, Extreme ultraviolet lithography, Semiconducting wafers, Coating, Tin, Silicon, Diffusion

Read Abstract +

Proceedings Article | 9 April 2024 Poster + Paper

Understanding and improving performance of 14-nm HP EUV lithography via rational design of materials

Si Li, Daniel Sweat, Xinlin Lu, Kelsey Brakensiek, Pengtao Lu, Joyce Lowes, Veerle Van Driessche, Douglas Guerrero

Proceedings Volume 12957, 129571T (2024) https://doi.org/10.1117/12.3010498

KEYWORDS: Polymers, Extreme ultraviolet lithography, Line width roughness, Lithography, Adhesives, Adhesion, Extreme ultraviolet

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years