Dr. Peter Scheibelhofer
at ams-OSRAM AG
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 30 November 2023 Paper
Jakob Wilhelm Hinum-Wagner, Peter Scheibelhofer, Samuel Marko Hörmann, Christoph Schmidt, Gandolf Feigl, Jochen Kraft, Alexander Bergmann
Proceedings Volume 12794, 127940S (2023) https://doi.org/10.1117/12.3000805
KEYWORDS: Waveguides, Silicon, Semiconducting wafers, Wave propagation, Data modeling, Diffractive optical elements, Cladding, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Photonic integrated circuits

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