We report a novel concept of tuning the VCSEL wavelength by varying the optical thickness of the laser cavity. This is achieved by implementing an intra-cavity grating pattern with a variable fill factor. The optical thickness of the cavity and the corresponding resonance wavelength will depend on the fill factor of the grating, its height and the refractive index contrast between the overgrowth and the grating layers. We developed a fabrication process based on two steps growth epitaxy and a lithographic intra-cavity grating to define the VCSEL wavelength at the emitter level. A 20 nm wide tuning range around 940nm has been demonstrated using this technique.
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