Dr. Rik van Laarhoven
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 April 2023 Presentation + Paper
Christina Porter, Teis Coenen, Niels Geypen, Sandy Scholz, Loes van Rijswijk, Han-Kwang Nienhuys, Jeroen Ploegmakers, Johan Reinink, Hugo Cramer, Rik van Laarhoven, David O'Dwyer, Peter Smorenburg, Andrea Invernizzi, Ricarda Wohrwag, Hugo Jonquiere, Juliane Reinhardt, Omar el Gawhary, Simon Mathijssen, Peter Engblom, Heidi Chin, William Blanton, Sury Ganesan, Brian Krist, Florian Gstrein, Mark Phillips
Proceedings Volume 12496, 124961I (2023) https://doi.org/10.1117/12.2658495
KEYWORDS: Etching, Metrology, Overlay metrology, Signal detection, Diffraction, Semiconducting wafers, 3D metrology, X-rays, Nanosheets, Scatterometry

Proceedings Article | 28 March 2017 Presentation + Paper
Hugo Cramer, Elliott Mc Namara, Rik van Laarhoven, Ram Jaganatharaja, Isabel de la Fuente, Sharon Hsu, Filippo Belletti, Milos Popadic, Ward Tu, Wade Huang
Proceedings Volume 10145, 101451B (2017) https://doi.org/10.1117/12.2260268
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Process control, Logic, Etching, Metrology, Scanners, Manufacturing, Wafer testing, Reticles

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