Dr. Ruimeng Zhang Profile

Dr. Ruimeng Zhang

at Brewer Science Inc

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Publications (2)

Proceedings Article | 1 May 2023 Presentation + Paper

Novel assist layers to enhance EUV lithography performance of photoresists on different substrates

Si Li, Joyce Lowes, Ruimeng Zhang, Ming Luo, Kelsey Brakensiek, Veerle Van Driessche, Douglas Guerrero

Proceedings Volume 12498, 124980N (2023) https://doi.org/10.1117/12.2658529

KEYWORDS: Semiconducting wafers, Extreme ultraviolet lithography, Coating, Coating thickness, Silicon, Photoresist materials, Adhesion, Line width roughness, Resistance, Adhesives

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Proceedings Article | 25 May 2022 Presentation + Paper

Realization of sub-30-pitch EUV lithography through the application of functional spin-on glass

Yichen Liang, Kelsey Brakensiek, Joyce Lowes, Andrea Chacko, Ruimeng Zhang, Veerle Van Driessche, Xiaolong Lang, Jaishankar Kasthuri, Ming Luo, Douglas Guerrero

Proceedings Volume 12055, 120550A (2022) https://doi.org/10.1117/12.2610985

KEYWORDS: Extreme ultraviolet lithography, Adhesives, Polymers, Etching, Plasma etching, Optical lithography, Semiconducting wafers

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