Dr. Sergey P. Tarabrin Profile

Dr. Sergey P. Tarabrin

Technical Competence Leader at ASML Netherlands BV

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Publications (3)

Proceedings Article | 13 March 2018 Paper

Study of µDBO overlay target size reduction for application broadening

Victor Calado, Jérôme Dépré, Clément Massacrier, Sergey Tarabrin, Richard van Haren, Florent Dettoni, Régis Bouyssou, Christophe Dezauzier

Proceedings Volume 10585, 1058507 (2018) https://doi.org/10.1117/12.2297673

KEYWORDS: Overlay metrology, Semiconducting wafers, Metrology, Diffraction, Diffraction gratings, Photons

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Proceedings Article | 5 March 2008 Paper

Estimation of diffractional losses in dielectric corner reflectors

Sergey Tarabrin

Proceedings Volume 7009, 70091L (2008) https://doi.org/10.1117/12.795324

KEYWORDS: Reflectors, Dielectrics, Prisms, Magnetism, Reflection, Gaussian beams, Light scattering, Scattering, Dielectric polarization, Mirrors

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Proceedings Article | 9 July 2007 Paper

Gravitational wave- and radiation pressure-driven dynamics of a Fabry-Perot cavity

Sergey Tarabrin

Proceedings Volume 6727, 67270M (2007) https://doi.org/10.1117/12.752284

KEYWORDS: Mirrors, Signal detection, Fabry–Perot interferometers, Sensors, LIGO, Phase shifts, Interferometers, Antennas, Interference (communication), Oscillators

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