Nanoimprint lithography is applied to manufacturing of cell culture dish and biosensor. The outgas released from the material often causes defects on patterns. Gas permeable templates were derived from cellulose for ultraviolet nanoimprint lithography process. The templates were made of thermoset cellulose of acrylic group and methacrylic group. The light transmission rate of the thermoset cellulose film and mechanical properties and pattern structure of the gas permeable template were measured. The template with acrylic group baked at 80 °C for 10 min. showed superior mechanical properties. This suggests the template had a large number of crosslinked points. After pattern transfer from quartz template, structures of the holes, the pillars, and the lines and spaces on the gas permeable template were observed.
We have been trying to improve nanoimprint lithography performance through modification of template materials. We have reported a biomass based template with gas permeability which decreases transcriptional defects on template materials caused by involved solvents and cracked gasses generated from imprinted materials. (SPIE2016 and 2017) The line patterning results using the biomass based gas permeable template were better to reduce the line pattern failure as compared with that of quartz based template as the standard reference. In this study, we will report a mechanical property improvement of the template by blending cellulose nanofiber (CNF) to the biomass template. The blended template showed improved gas transmission coefficient and mechanical properties than non-blended template. The proposed nanoimprint lithography using biomass based template with gas permeable and gaseous adsorption is one of the most promising processes ready to use for mass-production of nanoscale devices.
A cellulose-based gas permeable mold having thermal crosslinking group for nanoimprint lithography has been developed to prevent transcriptional defects by volatile solvents from nanoimprinting materials. 3 wt.% of thermal initiator was required for producing the cellulose-based gas permeable mold. The void on 10 μm line structure of imprinted UV crosslinked resin with acetone as volatile solvents in nanoimprint lithography process using non-gas permeable mold was significantly removed using the cellulose-based gas permeable mold due to its high oxygen gas permeability. The cellulosebased gas permeable mold allows the employment of solvent including imprinting materials such as compounds and alloy particle.
Silicone elastomers ( polydimethylsiloxane _ PDMS) are widely used in the field of imprint lithography and microcontactprinting (μCP). When performing microcontactprinting, the mechanical properties of the PCMS as a base material have a great influence on the performance of the device. Cellulose nanofibers having features of high strength, high elasticity and low coefficient of linear expansion have attracted attention in recent years due to their characteristics. Therefore, three types of crystalline cellulose having different molecular weights were added to PDMS to prepare a composite material, and dynamic viscoelasticity was measured using a rheometer. The PDMS with the highest molecular weight crystalline cellulose added exhibited smaller storage modulus than PDMS with other molecular weight added in all temperature ranges. Furthermore, when comparing PDMS to which crystalline cellulose was added and PDMS which is not added, the storage modulus of PDMS to which cellulose was added in the low temperature region was higher than that of PDMS to which it was not added, but it was reversed in the high temperature region It was a result. When used in a low temperature range (less than 150 ° C.), it can be said that cellulose can function as a reinforcing material for PDMS.
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