Shiyao Zhu
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 8 November 2018 Paper
Proceedings Volume 10818, 108180V (2018) https://doi.org/10.1117/12.2500281
KEYWORDS: Lithography, Interferometers, Photoresist materials, Optical encoders, Diffraction gratings, Mirrors, Atomic force microscopy, Laser applications, Photomasks, Lutetium

Proceedings Article | 6 November 2018 Paper
Proceedings Volume 10818, 108181O (2018) https://doi.org/10.1117/12.2500576
KEYWORDS: Interferometers, Diffraction gratings, Diffraction, Mirrors, Doppler effect, Interferometry, Laser sources, Distance measurement, Laser stabilization, Photodetectors

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