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Dr. Shuko Yokoyama
at Micro Optics Co Ltd
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Publications (1)
Proceedings Article | 19 July 1999 Paper
High-speed and high-resolution heterodyne interferometer using a three-mode laser
Toshiyuki Yokoyama, Tsutomu Araki, Shuko Yokoyama, Norihito Suzuki
Proceedings Volume 3749, (1999) https://doi.org/10.1117/12.355019
KEYWORDS: Interferometers, Heterodyning, Signal detection, Polarization, Sensors, Signal processing, Silicon, Target detection, Micro optics, Beam splitters
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