Dr. Sonali Chopra Profile

Dr. Sonali Chopra

at SandBox Semiconductor

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 25 March 2020 Paper

Accelerated optimization of multilayer trench etches using model-based experimental design

Kara Kearney, Sonali Chopra, Xilan Zhu, Yang Ban, Roger Bonnecaze, Meghali Chopra

Proceedings Volume 11329, 113290Z (2020) https://doi.org/10.1117/12.2552156

KEYWORDS: Etching, System on a chip, Silicon, Calibration, Model-based design, Argon, Optimization (mathematics), Critical dimension metrology, Semiconductors, Plasma etching

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years