We described a multi-probe system comprising three laser interferometers and one autocollimator to measure a flat bar
mirror profile with nanometer accuracy. The simulation and pre-experiment of multi-probe system have been conducted
on an X-Y linear stage which is composed of a ball bearing slider and a stepping motor. The two standard deviation of
the flat bar mirror profile is mainly fitting the range of simulation results (±20 nm). Comparison of our measured data
with the results measured by ZYGO white light interferometer system showed agreement to within approximately ±30
nm, excluding some points at the edge of the mirror. From the pre-experiment results, we conclude that the systematic
error caused by accuracy of the moving stage can't be ignored. To eliminate this systematic error, the multi-probe system
has been implemented on a high-precision micro-coordinate measuring machine (M-CMM) that has been built at the
Advanced Industrial Science and Technology (AIST).
As the global R&D competition is intensified, more speedy measurement instruments are required both in laboratories and production process. In machinery areas, while contact type coordinate measuring machines (CMM) have been widely used, noncontact type CMMs are growing its market share which are capable of measuring enormous number of points at once. Nevertheless, since no industrial standard concerning an accuracy test of noncontact CMMs exists, each manufacturer writes the accuracy of their product according to their own rules, and this situation gives confusion to customers. The working group ISO/TC 213/WG 10 is trying to make a new ISO standard which stipulates an accuracy test of noncontact CMMs. The concept and the situation of discussion of this new standard will be explained. In National Metrology Institute of Japan (NMIJ), we are collecting measurement data which serves as a technical background of the standards together with a consortium formed by users and manufactures. This activity will also be presented.
The surface flatness and the uniformity in thickness and refractive index of a mask-blank glass have been
requested in semiconductor industry. The absolute optical thickness of a mask-blank glass of seven-inch square
and 3mm thickness was measured by three-surface interferometry in a wavelength tuning Fizeau interferometer.
Wavelength-tuning interferometry can separate in frequency space the three interference signals of the surface
shape and the optical thickness. The wavelength of a tunable laser diode source was scanned linearly from 632
nm to 642 nm and a CCD detector recorded two thousand interference images. The number of phase variation of
the interference fringes during the wavelength scanning was counted by a temporal discrete Fourier transform.
The initial and final phases of the interferograms before and after the scanning were measured by a phase
shifting technique with fine tunings of the wavelengths at 632 nm and 642 nm. The optical thickness defined by
the group refractive index at the central wavelength of 337 nm can be measured by this technique. Experimental
results show that the cross talk in multiple-surface interferometry caused a systematic error of 2.0 microns in the
measured optical thickness.
Assessment of measurement performance of gear measuring instrument is not easy task since a traceable master piece with sufficient accuracy has not been available. We propose a new artifact named Double Ball Artifact (DBA) which consists of a base plate and two balls. It has advantages of inexpensive, accurate, and calibrated with traceability. The examples of measurements by gear checkers and CMM will be presented to confirm the usefulness and validity of the artifact.
Ball plates have been increasingly used for checking the performance of coordinate measuring machines (CMMs) in Japan. In future, the ball plate will become a popular gauge for checking or calibrating the CMM in Japan. Currently, only the National Metrology Institute of Japan (NMIJ) can calibrate the ball plate in Japan. There are no other institutes or calibration laboratories able to calibrate the ball plate. Therefore, we organized a ball plate round-robin measurement to create the opportunity to relay our calibration technique to other institutes. This is the first domestic comparison of a ball plate calibration in Japan. Sixteen institutes including NMIJ participated in the comparison. In this round-robin measurement, we formed two groups and supplied two ball plates (KOBA 420×420 mm, RETTER 420×420 mm) and two material standards of length made by NMIJ for this round-robin measurement. The round-robin measurement took place from October 2003 to September 2004. We describe the results of the comparison in this paper.
To calibrate a squareness standard and a height micrometer, the Korea Research Institute of Standards and Science (KRISS) has built a new linear measuring machine moving vertically. The main requirement on design of the machine is to achieve the flexibility to calibrate several kinds of standards such as square master, cylindrical square, height micrometer and linear height gauge which are positioned vertically on the surface plate. The system consists of a precision granite column with an air bearing state, a laser interferometer and two electronic probes. In order to calibrate the squareness standards, the granite beam is used as a reference of squareness and a guide of vertical movement. The instrument incorporates a frequency stabilized He-Ne laser. The vertical movement is measured by a laser interferometer whose operation is based on the heterodyne measurement technique. Positioning for calibrating the height micrometer is undertaken by using a vertical state and a horizontal stage, and its measurement range of 0-700 mm. The paper gives a description of the system and a preliminary measurement results.
Non-destructive profiling of the front and rear surfaces of a transparent media by optical interferometry is described. Interferometric measurement of a transparent parallel media leads to problems of multiple-beam interference noise between the two surfaces. A wavelength scanning interferometer with new sampling functions can determine both surface shapes simultaneously suppressing internal reflection noises less than order of R2(lambda) where R is the reflection index of the media and (lambda) is the source wavelength.
Japanese Ultimate Flatness Interferometer (FUJI) is a Fizeau type flatness interferometer that is capable of measuring flatness over 310 mm diameter. The concept and technologies applied to FUJI are explained. To demonstrate the performance of FUJI, an international comparison was held with Australia, and the difference of two independent measurements were smaller than four nanometers.
A laser tracking interferometer system (LTS), which can measure 3D coordinates, has been developed in our laboratory. The LTS makes use of the principle of laser trilateration. The principle satisfies Abbe's principles and the coordinates are calculated solely form length measurements. Consequently, measurements directly traceable to length standard can be achieved. The first generation trackers, however, were large, heavy and not so accurate. So, we developed a compact, accurate laser tracker. It has a hemisphere mirror, which is used as a tracking mirror and is driven by an X-Y moving table. The performance of this laser tracker was checked by a high precision coordinate measuring machine. The results of the experiments show that the displacement measuring error of this laser tracker is below 0.6 micrometers , which is much better than any other conventional laser trackers.
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