Stefanie Sergeant
at imec
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 27 July 2021
JM3, Vol. 20, Issue 03, 031010, (July 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.3.031010
KEYWORDS: Pellicles, Extreme ultraviolet lithography, Extreme ultraviolet, Raman spectroscopy, Scanners, Carbon, Carbon nanotubes, Plasma, Particles, Coating

Proceedings Article | 23 March 2021 Presentation + Paper
Proceedings Volume 11609, 116090Y (2021) https://doi.org/10.1117/12.2584519
KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Carbon nanotubes, Scanners, Plasma, Thermography, Photomask technology, Hydrogen, Spectroscopy

Proceedings Article | 22 February 2021 Presentation + Paper
J. Bogdanowicz, Y. Oniki, K. Kenis, Y. Muraki, T. Nuytten, S. Sergeant, A. Franquet, V. Spampinato, T. Conard, I. Hoflijk, J. Meersschaut, N. Claessens, A. Moussa, D. Van Den Heuvel, J. Hung, R. Koret, A.-L. Charley, P. Leray
Proceedings Volume 11611, 116111Q (2021) https://doi.org/10.1117/12.2581800
KEYWORDS: Etching, Metrology, Transistors, Spectroscopes, Raman spectroscopy, Critical dimension metrology, Spectroscopy, Photoemission spectroscopy, X-rays, Scanning electron microscopy

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