Takashi Matsuda
Staff Engineer at Semiconductor Co
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 March 2011 Paper
Takashi Matsuda, Shigeo Irie, Tadami Shimizu, Takashi Yuito, Yasuko Tabata, Yuuji Nonami, Akio Misaka, Taichi Koizumi, Masaru Sasago
Proceedings Volume 7973, 797316 (2011) https://doi.org/10.1117/12.878727
KEYWORDS: Photomasks, Source mask optimization, Binary data, Halftones, Logic devices, Lithographic illumination, Phase shifts, Resolution enhancement technologies, Logic, Optical proximity correction

Proceedings Article | 13 March 2010 Paper
Takashi Yuito, Hiroshi Sakaue, Takashi Matsuda, Tadami Shimizu, Shigeo Irie, Fumio Iwamoto, Akio Misaka, Taichi Koizumi, Masaru Sasago
Proceedings Volume 7640, 76401B (2010) https://doi.org/10.1117/12.848025
KEYWORDS: Photomasks, Printing, Lithography, Image enhancement, Logic, Transmittance, Lab on a chip, Resolution enhancement technologies, Immersion lithography, Phase shifts

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