Mr. Takeshi Fujiwara Profile

Takeshi Fujiwara

at Toshiba Corp

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Author

Publications (3)

Proceedings Article | 1 August 2002 Paper

Detection of half-tone PSM pinhole with DUV reflected light source

Takeshi Fujiwara, Hiromu Inoue, Kentaro Okuda, Takehiko Nomura, Mitsuo Tabata, Satoshi Endo

Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.476962

KEYWORDS: Inspection, Photomasks, Reflection, Light sources, Signal detection, Sensors, Optical simulations, Image sensors, Image transmission, Deep ultraviolet

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Proceedings Article | 11 March 2002 Paper

Half-tone PSM inspection sensitivity of 257-nm light source MC-3000

Hideo Tsuchiya, Kyoji Yamashita, Shinji Sugihara, Takeshi Fujiwara, Ryoji Yoshikawa

Proceedings Volume 4562, (2002) https://doi.org/10.1117/12.458360

KEYWORDS: Inspection, Phase shifts, Sensors, Photomasks, Chromium, Defect detection, Light sources, Manufacturing, Image sensors, Deep ultraviolet

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Proceedings Article | 27 December 1996 Paper

Phase measurement using Hg-Xe lamp and KrF excimer laser

Katsuki Oohashi, Takeshi Fujiwara, Takehiko Nomura, Akira Ono

Proceedings Volume 2884, (1996) https://doi.org/10.1117/12.262807

KEYWORDS: Phase measurement, Lamps, Excimer lasers, Light sources, Phase shifts, Halftones, Phase shift keying, Prisms, Objectives, Deep ultraviolet

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