CONFERENCE PROCEEDINGS
Advanced Search
Thierry Berthou
Sales Manager/Directeur Commercial at Silios Technologies
SPIE Involvement:
Author
Area of Expertise:
Optics , International Sales , Contracts Management
Websites:
Company Website
Publications (4)
Proceedings Article | 24 February 2009 Paper
Interference lithography processes with high-power laser pulses
A. Rodriguez, M. Ellman, I. Ayerdi, N. Perez, S. Olaizola, J. Zhang, Z. Ji, T. Berthou, C. Peng, Y. Verevkin, Z. Wang
Proceedings Volume 7201, 72010R (2009) https://doi.org/10.1117/12.808834
KEYWORDS: Lithography, Laser systems engineering, Optical lithography, Electron beam lithography, Photoresist materials, Laser processing, Pulsed laser operation, Control systems, Beam splitters, Mirrors
Proceedings Article | 14 May 2008 Paper
Development of diffractive antireflection structures on ZnSe for high power CO2 laser applications
Fabien Reversat, Thierry Berthou, Stéphane Tisserand, Lionel Dupuy, Sophie Gautier, Peter Muys, Danae Delbeke, David Grojo, Mohammed Laraichi, Philippe Delaporte
Proceedings Volume 6992, 69920I (2008) https://doi.org/10.1117/12.782633
KEYWORDS: Etching, Absorption, Antireflective coatings, Plasma, Reactive ion etching, Photomasks, Carbon dioxide lasers, Zinc, Lithography, Thin films
Proceedings Article | 25 June 2007 Paper
Current developments and applications using multi-beam laser interference lithography for nanoscale structuring of materials
S. Z. Su, Ainhara Rodríguez, Santiago Olaizola, C. S. Peng, C. Tan, Yury Verevkin, Thierry Berthoud, Stéphane Tisserand
Proceedings Volume 6593, 65930G (2007) https://doi.org/10.1117/12.723620
KEYWORDS: Beam splitters, Fabrication, Optical lithography, Lithography, Nanolithography, Laser ablation, Photoresist materials, Laser crystals, Thin films, Laser applications
Proceedings Article | 12 June 2007 Paper
Formation of 4-beam laser interference patterns for nanolithography
Jin Zhang, Zuobin Wang, Yury Verevkin, Santiago Olaizola, Changsi Peng, Chunlei Tan, Ainara Rodriguez, Eric Daume, Thierry Berthou, Stéphane Tisserand, Ze Ji
Proceedings Volume 6593, 65930I (2007) https://doi.org/10.1117/12.723782
KEYWORDS: Lithography, Nanolithography, Laser applications, Electron beam lithography, Control systems, Beam splitters, Nanotechnology, Laser systems engineering, Scanning probe lithography, Optical lithography
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top