Surface-enhanced Raman spectroscopy provides a highly sensitive and non-destructive technique for surface analysis. In this paper, we developed a high-performance and transparent surface-enhanced Raman spectroscopy (SERS) sensing device which can be used as non-destructive and non-invasive analytical technique. The SERS device is composed of sandwiched transparent plasmonic flowers (STPF), which is a two-layer structure with the analyte placed between the two layers. The top layer is a quartz chip with arrays of Ag plasmonic flowers and the bottom layer is Ag thin film on silicon surface. The plasmonic flowers array provides “hot spots” while allowing laser and Raman scattering light to pass through the top layer for excitation and acquisition of Raman spectra from the backside. Ag flower arrays were prepared using a combination of near-field exposure and ion beam etching. Where the individual petals were spaced uniformly between each other and between the flower centers. We performed SERS detection of the fluorescent dye R6G using STPF. The STPF had a strong Raman enhancement effect with an enhancement factor of up to 107. Furthermore, the SERS device has good uniformity and repeatability with an RSD (relative standard deviation) of 9.23%. In summary, we have created transparent, sensitive and reproducible SERS device.
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