Dr. Timothy Kehoe Profile

Dr. Timothy Kehoe

Optical Engineer at IRIS Ireland

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Publications (2)

Proceedings Article | 18 March 2009 Paper

Physical properties of thin nanoimprint polymer films measured by photo-acoustic metrology

T. Kehoe, J. Bryner, V. Reboud, J. Vollmann, C. Sotomayor Torres

Proceedings Volume 7271, 72711V (2009) https://doi.org/10.1117/12.814162

KEYWORDS: Polymers, Polymer thin films, Photoacoustic spectroscopy, Interfaces, Acoustics, Nanoimprint lithography, Silicon, Polymethylmethacrylate, Metrology, Head-mounted displays

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Proceedings Article | 20 March 2008 Paper

Sub-wavelength optical diffraction and photoacoustic metrologies for the characterisation of nanoimprinted structures

T. Kehoe, J. Bryner, V. Reboud, N. Kehagias, S. Landis, C. Gourgon, J. Vollmann, J. Dual, C. Sotomayor Torres

Proceedings Volume 6921, 69210F (2008) https://doi.org/10.1117/12.772545

KEYWORDS: Diffraction, Diffraction gratings, Polymers, Photoacoustic spectroscopy, Silicon, Nanoimprint lithography, Polymethylmethacrylate, Metrology, Aluminum, Semiconducting wafers

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