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Victor Hui
at LAPP
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Publications (1)
Proceedings Article | 20 May 2022 Presentation + Paper
Transfer of an AlGaAs/GaAs crystalline Bragg mirror from a GaAs substrate to a fused silica substrate by direct bonding
V. Hui, A. André, A. Arnoult, P. Besson, C. Dubarry, C. Fontaine, F. Fournel, V. Lumineau, C. Navonne, L. Pinard, R. Flaminio
Proceedings Volume 12137, 121370D (2022) https://doi.org/10.1117/12.2621898
KEYWORDS: Gallium arsenide, Semiconducting wafers, Wet etching, Crystals, Surface finishing, Wafer bonding, Silica, Mirrors, Multilayers
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