Mr. Wakahiko Sakata Profile

Wakahiko Sakata

at Dai Nippon Printing Co Ltd

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Publications (2)

Proceedings Article | 26 May 2010 Paper

CMP dummy pattern based on VSB writer load

Wakahiko Sakata, Isaku Osawa, Shogo Narukawa, Tadahiko Takikawa, Hiroshi Mohri

Proceedings Volume 7748, 77481M (2010) https://doi.org/10.1117/12.864104

KEYWORDS: Chemical mechanical planarization, Photomasks, Vestigial sideband modulation, Current controlled current source

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Proceedings Article | 9 November 2005 Paper

Mask rule check for inspection of leading-edge photomask

Wakahiko Sakata, Kiyoshi Yamasaki, Shogo Narukawa, Naoya Hayashi

Proceedings Volume 5992, 59924E (2005) https://doi.org/10.1117/12.633850

KEYWORDS: Inspection, Photomasks, Defect detection, Manufacturing, Defect inspection, Optical proximity correction, Data conversion, SRAF, Head, Chromium

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