Dr. Walter M. Klahold Profile

Dr. Walter M. Klahold

at Montana State Univ.

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 1 March 2019 Presentation + Paper

Walter Klahold, Charles Lewandowski, Paul Nachman, Bradley Slezak, Brian D'Urso

Proceedings Volume 10934, 109340P (2019) https://doi.org/10.1117/12.2515721

KEYWORDS: Particles, Etching, Silicon carbide, Hydrogen, Oxides, Argon, Oxidation

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Keywords/Phrases