Optical metrology provides direct feedback for AR/VR/MR design verification and manufacturability evaluation by imitating the human eye’s optical properties of resolution, color sensitivity and uniformity over large FOVs, self-adaption to focus location, brightness and contrast. This paper defines a generic, standardized optical metrology platform to efficiently integrate various optical metrology instruments into the platform’s global coordinate system by utilizing a specially designed active-optical calibration target to precisely map the optical entrance pupil of any optical metrology instrument and device under test (DUT) to a common reference point, providing effective data correlation. The platform can easily accommodate common AR/VR/MR optical metrology equipment for measurements of: MTF/contrast, color and brightness, virtual distance, angular FOV, and binocular alignment error; to provide a unified metrology platform for optical measurements.
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