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Wei Xiao
at Univ of Southampton
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Publications (1)
Proceedings Article | 20 August 2020 Presentation
Embedded metal oxide plasmonics using local plasma oxidation of AZO for planar metasurfaces
Otto Muskens, Kai Sun, Wei Xiao, C. de Groot
Proceedings Volume 11460, 114600M (2020) https://doi.org/10.1117/12.2568755
KEYWORDS: Oxidation, Metals, Oxides, Plasmonics, Plasma, Sun, Reflectors, Multiplexing, Infrared radiation, Atomic layer deposition
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