Mr. Wilson Hsu Profile

Wilson Hsu

at Micron Technology Taiwan Inc

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Publications (2)

Proceedings Article | 2 April 2014 Paper

Integrated ADI optical metrology solution for lithography process control of CD and OV

Marlene Strobl, Wilhelm Tsai, Andy Lan, Tom Chen, Wilson Hsu, Henry Chen, Frida Liang, Alan Wang, Platt Hung, David Huang, Ethan Chiu, Paul Yu, Yi Song, Sylvia Yuan, Remco Dirks, Noelle Wright, Mariya Ponomarenko, Hugo Cramer, Baukje Wisse, Vincent Couraudon, Bijoy Rajasekharan, Reinder Plug, Stefan Kruijswijk, Henk Niesing

Proceedings Volume 9050, 90501J (2014) https://doi.org/10.1117/12.2047205

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Metrology, Overlay metrology, Lithography, Process control, Scanners, Time metrology, Lithium, Optical metrology

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Proceedings Article | 12 December 2009 Paper

Overlay improvement by ASML HOWA 5th alignment strategy

Raf Wang, CY Chiang, Wilson Hsu, Richer Yang, Todd Shih, Jackie Chen, Jonathan Chiu, Wythe Lin

Proceedings Volume 7520, 752023 (2009) https://doi.org/10.1117/12.839816

KEYWORDS: Semiconducting wafers, Optical alignment, Distortion, Overlay metrology, Front end of line, Lithography, Scanners, Capacitance, Current controlled current source, Yield improvement

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