We present a kind of depletion-mode silicon modulators based on cascade interleaved PN junctions, which
simultaneously provide high modulation efficiency and large modulation bandwidth. The interfaces of the PN junctions
are vertical to the waveguide's propagation direction and tolerant with ± 150nm junction misalignment on the cost of
little degradation on the modulation efficiency. The device was fabricated with standard 0.18μm CMOS process, and
provides a VπLπ < 1V • cm and an intrinsic bandwidth 39GHz. Over 10GHz electro-optical modulation bandwidth of the
device was experimentally obtained. High speed non-return-zero modulation with a bit rate up to 25Gbit/s was finally
demonstrated.
SOI (silicon-on-insulator)-based micro-resonator is the key building block of silicon photonics, which is considered as a
promising solution to alleviate the bandwidth bottleneck of on-chip interconnects. Silicon-based sub-micron waveguide,
microring and microdisk devices are investigated in Institute of Semiconductors, Chinese Academy of Sciences. The
main progress in recent years is presented in this talk, such as high Q factor single mode microdisk filters, compact thirdorder
microring filters with the through/drop port extinctions to be ~ 30/40 dB, fast microring electro-optical switches
with the switch time of < 400 ps and crosstalk < -23 dB, and > 10 Gbit/s high speed microring modulators.
We experimentally demonstrate a compact third-order silicon microring add-drop filter with high extinction ratios.
Perimeter compensation method was applied to solve the coupling induced frequency shift (CIFS) problem. After
carefully design and accurate fabrication, extinction ratio up to 30dB and 40dB are measured at through and drop port,
respectively.
Based on the basic principle of geometrical optics, an analytical method is presented in this paper. Each optical surface is regarded as an infrared source, and all optical surfaces behind it make up a new optical system. The sampling rays carrying certain energy are used to indicate the thermal radiation beams, and they are traced through the optical system to obtain the energy distribution on the image plane. The influence of thermal radiation in the infrared optical system is further analyzed. An infrared optical system is designed, which has been athermalized. The thermal radiations from each optical surface are analyzed and the superposition result is obtained.
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