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Xianyu Meng
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Publications (1)
Proceedings Article | 15 February 2022 Paper
A new method for step height characterization based on K-means algorithm
Proceedings Volume 12166, 121667Y (2022) https://doi.org/10.1117/12.2619314
KEYWORDS: Reconstruction algorithms, Computer simulations, Denoising, Data centers, Data processing, Associative arrays, Reliability, Visualization, Standards development, Metrology
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