Dr. Xiaoli Zhu
Associate professor at Institute of Microelectronics, Cas
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 23 August 2017 Presentation + Paper
Xiaoli Zhu, Lai Wei, Hailiang Li, Leifeng Cao, Changqing Xie
Proceedings Volume 10386, 103860Q (2017) https://doi.org/10.1117/12.2272803
KEYWORDS: Electron beam lithography, X-rays, Diffraction, Spectroscopy, Diffraction gratings, Lithography, X-ray lithography, X-ray diffraction, Gold

SPIE Journal Paper | 19 August 2017
Xiaoli Zhu, Hailiang Li, Leifeng Cao, Shenye Liu, Peixiong Shi, Changqing Xie
JM3, Vol. 16, Issue 03, 034503, (August 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.3.034503
KEYWORDS: X-rays, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, X-ray characterization, Nanofabrication, Diffraction gratings, Photomasks, Diffraction

SPIE Journal Paper | 5 March 2013
Changqing Xie, Xiaoli Zhu, Hailiang Li, Jiebin Niu, Yilei Hua, Lina Shi
OE, Vol. 52, Issue 03, 033402, (March 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.3.033402
KEYWORDS: X-rays, X-ray lithography, Gold, Silicon carbide, X-ray diffraction, Electron beam lithography, X-ray optics, Laser welding, Diffraction gratings, Lithography

Proceedings Article | 12 January 2009 Paper
Jie Ma, Xiaoli Zhu, Weizhong Zhu, Changqing Xie, Tianchun Ye, Peixiong Shi
Proceedings Volume 7133, 713336 (2009) https://doi.org/10.1117/12.810640

SPIE Journal Paper | 1 May 2008
Min Zhao, Xiaoli Zhu, Baoqin Chen, Changqing Xie, Min Liu, Jiebing Niu, Longyu Kuang, Leifeng Cao
OE, Vol. 47, Issue 05, 058001, (May 2008) https://doi.org/10.1117/12.10.1117/1.2919717
KEYWORDS: X-ray lithography, X-rays, Diffraction gratings, Diffraction, Lithography, Photomasks, Gold, X-ray diffraction, Spectroscopy, Spectrographs

Proceedings Article | 15 January 2008 Paper
Proceedings Volume 6832, 68321S (2008) https://doi.org/10.1117/12.755092
KEYWORDS: Diffraction, Zone plates, X-rays, Near field diffraction, X-ray diffraction, Computer simulations, X-ray astronomy, X-ray lithography, X-ray technology, Synchrotron x-ray imaging

Proceedings Article | 4 January 2008 Paper
Xiaoli Zhu, Changqing Xie, Tianchun Ye, Min Zhao, Jie Ma, Ji Jiang, Jiebin Niu, Ming Liu
Proceedings Volume 6832, 68320V (2008) https://doi.org/10.1117/12.758100
KEYWORDS: X-ray lithography, X-rays, Electron beam lithography, Gold, Electroplating, Polymethylmethacrylate, Photomasks, Silicon, X-ray telescopes, Photoresist processing

Proceedings Article | 21 November 2007 Paper
Min Zhao, XiaoLi Zhu, Baoqin Chen, Jiebin Niu, Ming Liu, Changqing Xie
Proceedings Volume 6827, 682728 (2007) https://doi.org/10.1117/12.757739
KEYWORDS: Electron beam lithography, Silicon, Electron beams, Chemical species, Hydrogen, Backscatter, Nanoimprint lithography, Lithography, Nanolithography, Nanostructures

Proceedings Article | 21 November 2007 Paper
Jie Ma, Xiaoli Zhu, Changqing Xie, Ming Liu, Min Zhao, Ji Jiang
Proceedings Volume 6827, 68272A (2007) https://doi.org/10.1117/12.757819
KEYWORDS: Photomasks, X-ray lithography, Semiconducting wafers, X-rays, Gold, Beam propagation method, Optical design, Wave propagation, Light wave propagation, Lithography

Proceedings Article | 21 November 2007 Paper
Proceedings Volume 6724, 67241O (2007) https://doi.org/10.1117/12.782916
KEYWORDS: X-rays, Spectroscopy, Diffraction, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, Photomasks, Electron beams, Silicon

Proceedings Article | 14 November 2007 Paper
Xiaoli Zhu, Deqiang Wang, Changqing Xie, Leifeng Cao, Jiamin Yang, Tianchun Ye, Jiebin Niu, Baoqin Chen, Ming Liu
Proceedings Volume 6722, 672208 (2007) https://doi.org/10.1117/12.782678
KEYWORDS: X-rays, Electron beam lithography, Diffractive optical elements, Electroplating, Gold, Photomasks, X-ray diffraction, X-ray lithography, Silicon, X-ray optics

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top