For enhancing the light efficiency of lenslet array, the technique of binary optics has been used. Most binary lenslet array are designed of an array of Fresnel zone plate. A zone plate has simultaneously convergent focal points as well as divergent foci, so the intensity on either side is reduced. We have designed a lens array which combines the real focus with virtue focus, thus the intensity obtained is much higher than in a conventional array. In fabrication, four phase levels and eight phase levels have been used, high efficiency is thus obtained. Twelve X twelve, 16 X 16 equal intensity arrays have been produced. Testing of the phase structure and other parameters also are introduced.
Lenslet arrays with eight-level phases are fabricated by the method of etching and film coating, respectively. The diffraction efficiency of that component is about 80%. Two types of lenslet grating are constructed, the one is a lenslet array with a pinhole grating, and the other is a combination of two sets of lenslet arrays. The homogeneity of the array spots obtained by a lenslet grating is better than that by a single lenslet array. The fabrication process and the testing method are described, some experimental results are listed.
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