Mr. Yi Cheng Profile

Yi Cheng

at ChangXin Memory Technologies Inc

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 21 November 2023 Poster + Paper

Research of mask photoresist sensitivity for local critical dimension uniformity improvement in ArF lithography

Yilei Zeng, Yi Cheng, Yu Zhang, Peisheng Li, Zhong Zhang, Min Zhou, Xin Zhang

Proceedings Volume 12751, 1275119 (2023) https://doi.org/10.1117/12.2687170

KEYWORDS: Power consumption, Advanced patterning, Shrinkage, Semiconductors, Lithography, Photoresist materials, Line width roughness, Line edge roughness, Semiconducting wafers, Photoresist developing

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Proceedings Article | 21 November 2023 Poster + Paper

An advanced 2D feature transmitted algorithm for mask defect detection

Yilei Zeng, Yi Cheng, Mengyao Jin, Hunter Li

Proceedings Volume 12751, 127510Z (2023) https://doi.org/10.1117/12.2684046

KEYWORDS: Defect detection, Detection and tracking algorithms, Visualization, Air contamination, Image processing, Inspection, Inspection equipment, Transmittance, Algorithm development, Semiconducting wafers

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Proceedings Article | 28 April 2023 Poster + Paper

Comprehensive investigation on improvement of local CDU for sub-20nm DRAM devices

Zhong Zhang, Yang Zhang, Liang Zhu, Yi Cheng, Hui Dong, Kaige Gong, Jingjing Zhao, Jun Xu, Alex Ren

Proceedings Volume 12494, 124941H (2023) https://doi.org/10.1117/12.2657250

KEYWORDS: Lithography, Reticles, Optical lithography, Deep ultraviolet, Etching, Photoresist materials, Light sources and illumination, Image enhancement, Source mask optimization, Nanoimprint lithography, Phase shifts

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Proceedings Article | 1 December 2022 Poster + Paper

Research of high-transmission phase-shift mask on critical dimension uniformity in ArF lithography

Yilei Zeng, Yi Cheng, Peisheng Li, Teng Zhang, Zhong Zhang, Yu Zhang, Debao Ding

Proceedings Volume 12293, 122930X (2022) https://doi.org/10.1117/12.2641687

KEYWORDS: Lithography, Metrology, Lithographic illumination, Polarization, Scanning electron microscopy, Transmittance, Photomasks, Nanoimprint lithography, Semiconducting wafers, Phase shifts

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